Microwave cavity perturbation of nitrogen doped nano-crystalline diamond films

Nano-crystalline Diamond Films for X-ray Lithography Mask

Nitrogen-Induced Degradation of Corrosion Resistance of Platinum/Ruthenium/Nitrogen-Doped Diamond-like Carbon Thin Films

An influence of nitrogen incorporation on the chemical composition, bonding structure, surface morphology and activity, adhesion strength, and corrosion resistance of platinum/ruthenium/nitrogen-doped diamond-like carbon PtRuN-DLC thin films deposited on conductive p-Si 100 substrates using dc magnetron sputtering deposition was investigated using X-ray photoelectron spectroscopy, micro-Raman s...

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Accuracy of Microwave Cavity Perturbation Measurements

Techniques based on the perturbation of cavity resonators are commonly used to measure the permittivity and permeability of samples of dielectric and ferrite materials at microwave frequencies. They are also used to measure the local electric and magnetic field strengths in microwave structures including the shunt impedances of cavity resonators and the coupling impedances of slow-wave structur...

Microwave Plasma-Activated Chemical Vapor Deposition of Nitrogen-Doped Diamond. II: CH4/N2/H2 Plasmas

We report a combined experimental and modeling study of microwave-activated dilute CH4/N2/H2 plasmas, as used for chemical vapor deposition (CVD) of diamond, under very similar conditions to previous studies of CH4/H2, CH4/H2/Ar, and N2/H2 gas mixtures. Using cavity ring-down spectroscopy, absolute column densities of CH(X, v = 0), CN(X, v = 0), and NH(X, v = 0) radicals in the hot plasma have ...